Radiator Optimization Design for Planar Motors Based on Parametric Components

Focusing on the design problem of high-performance radiators for planar motors in the wafer stage of the lithography machine, a thermal-fluid coupling optimization scheme based on parametric solid components was proposed. The mapping method between component parameters and pseudo-density values was established. An analytical solution for the sensitivity of pseudo-density to component parameters was given. The conjugate heat transfer function with the shallow channel approximation term was solved through the pseudo-density information. In the optimization example, circular components were selected, and the position and the size of solid components were chosen as design variables. In order to eliminate calculation errors caused by pseudo-density, an optimized pseudo-density field was converted into the result based on parametric components. Compared to the reference motor radiator, the average surface temperature rise of the optimized water-cooling motor radiator is reduced by 22.4%, which verifies the feasibility and effectiveness of the proposed method.